power, supply, series, DC sputter processes

BDS SP 3, 6 and 12 Sputter Power Supplies

BDS SP 3, 6 and 12 Sputter Power Supplies

New Bdiscom power supply series for DC sputter processes. Three range available:

* 3KW F.S., 1000 Volt F.S., 6 Amps Max Output

* 6KW F.S., 1000 Volt F.S., 12 Amps Max Output

* 12KW F.S., 1000 Volt F.S., 25 Amps Max Output

Arc detection (< 200 nSec ) and digital interfaces. Suitable for mid range R/D and industrial DC sputter tools

New Bdiscom DC power supplies for Sputtering deposition.

Some highlights:

* All units equipped with user friendly active touch screen display

* Ignition voltage up to 1,1 kVolt

* Arc detection DV/DT off time < 1mSec

* Cooling air

  • Power requirements: 400VAC - 3PH 50Hz (±10%)
  • Max power output: 3, 6 and 12kw F.S.
  • Max voltage output: 1000 Volt F.S.
  • Max current output: 6, 12 and 25 Amps
  • Ignition: 1,1 KVolt
  • Arc Detector: < 200 nSec detection, < 1 mSec DV/DT offtime
  • Efficiency: > 90 %
  • Display: Touch panel 240x128 pixel
  • Regulation mode: Power / Voltage / Current (Selectable)
  • Cooling: Air (forced)
  • Interfaces: RS 232 - Profibus - A/D (Profibus Option)
  • Operating Temperature: 5-40 ° C
  • Dimensions: 19” RACK - 4HU

EMC classification according to EN 55011:

This is a ISM (Industrial Scientific Medical) Equipment and it is EN 55011 Group 2, Class A compliant.

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