The BDS VIMM - Variable Inductor Manual Matching Unit - is the most compact RF 13.56 MHz inductive manual matching network currently available on the market with some unique features described in the below specifications.
The intended use is in low pressure plasma system like sputtering, PECVD, plasma cleaning, plasma etching and plasma activation.
One of its key feature is the very compact and easy design with great advantages of the internal variable inductor circuit.
The optimal installation is directly above the vacuum chamber electrical feedthrough. The mechanical layout can be adjusted to match any customer requirement.
CE MARK - MADE IN ITALY