BDISCOM Srl

PLASMA MATRIX is fully designed and manufactured by BDISCOM with a completely new approach to deliver state of the art equipment at a fraction of the competitor's price. No technical compromise: modern RF (13.56MHz) generator and matching unit, precision vacuum measurement, micro mass flow controllers, complete and flexible software. A unique feature for this class of instruments is graphic display and touchscreen operation. The system includes a 2 stage rotary pump.

Highlights and benefits

• Easy to use
• 304 SS Vacuum Chamber, L=120 D=220 H=87 (mm)
• Sample Tray 110 x 210 (mm)
• Built in robust 13.56 MHz RF Generator 200 Watt
• Matching Network unit integrated in the process chamber
• Microprocessor control
• Up to 10 storable recipes
• User friendly LCD touch screen display
• 2 precision micro MFC (Mass Flow Controllers) for gas delivery. Precise gas mixtures can be obtained
• Built in Pirani gauge for precision pressure level monitoring
• Case Dimension L=410 D=450 H=200 (mm)
• Weight = 15 kg
• World Wide power supply 95 to 250 V, 42-60 Hz single phase